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Attolight
Attolight started off to revolutionize cathodoluminescence (CL): design top of the line CL instruments that deliver superior performance, maximum ease-of-use and to make quantitative cathodoluminescence possible. The Company firmly believes in the potential of cathodoluminescence and aims at establishing the technology as a standard in-line inspection method in semiconductor industry.
Allalin - Hybridized SEM - Spectroscopic Platform
SEM – Cathodoluminescence – Photoluminescence
Spectroscopic Analysis – Pump & Probe
Electrical Measurements – Nanoprobes
Mönch - Light Collection / Injection for STEM
Cathodoluminescence – Photoluminescence –
Thermo-emission – Compatiblity with EELS, EDS…
Säntis 300 - Full Wafer Cathodoluminescence Microscope
The Säntis 300 system has been designed for fully automated control of 150, 200 and 300mm wafers.
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