Clean Systems

YES G Series

YES G Series

R&D Plasma Cleaning System The G1000 offers four shelves. This parallel capacitive system excels in plasma cleaning, stripping, and surface modification in 40 kHz or 13.56 MHz. Choose from five plasma modes. Anisotropic modes inc...
EcoClean

EcoClean

Automated Plasma Resist Strip/Descum System The EcoClean is YES’s small-footprint, high-throughput downstream plasma strip/descum solution, with high etch rate and no/negligible damage to surfaces. Minimize cost of ownership, g...
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    Material Science & Nanotechnology