Park NX20 - Complete AFM System

The leading nano metrology tool for failure analysis and large sample research

As an FA engineer, you’re expected to deliver results. There’s no room for error in the data provided by your instruments. Park NX20, with its reputation as the world’s most accurate large sample AFM, is rated so highly in the semiconductor and hard disk industry for its data accuracy.

Specifications

Single-module flexure XY scanner with closed-loop control
Scan range : 100μm x 100μm
                         50μm x 50μm 
                         25μm x 25μm
20-bit position control and 24-bit position sensor

Motorized Stage

XY travel range : 150 mm (200 mm optional)
Z travel range : 25 mm
Focus travel range : 8 mm
Precision encoder for all axes (optional)

Guided high-force Z scanner
Scan range : 15 µm
                        30 µm
20-bit position control and 24-bit position sensor

Sample Mount

Up to 150 mm (200 mm optional)
Vacuum grooves to hold wafer samples

Vision

Objective Lens

10× (0.21 NA) objective lens with ultra-long working distance
20× (0.42 NA) objective lens with long working distance and high resolution
Direct on-axis vision of sample surface and cantilever
Coupled with 10× objective lens (20× optional)
Field-of-view : 840 × 630 µm (420 × 315 µm optional)
CCD : 5M pixel

Software

SmartScan™

Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)

XEI

AFM data analysis software

Electronics

Signal processing

ADC : 18 channels
4 high-speed ADC channels (64 MSPS)
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 12 channels
2 high-speed DAC channels (64 MSPS)
20-bit DACs for X, Y, and Z scanner positioning
Maximum data size : 4096 x 4096 pixels

Integrated functions

3 channels of flexible digital lock-in amplifier
Digital Q control

External signal access

20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias