AC300 is an economic desktop Vacuum Spin Coater without vacuum chunk which is designed for quality coating of sol-gel at the lowest cost. By using adhesive tape to stick and hold samples on the rotating plate, the instrument provides the advantages of cost effectiveness and ease of maintenance. Complete accessories such as vacuum chuck, oilless vacuum pump, electrical wire is included for immediately use.
Ultra-high speed precision and stability design, internal cavity vacuum design (up to -0.08MPa) to reduce air flow disturbance, special stage tooling design to achieve ultra-high glue uniformity.
Features
Maximum for 12 inch wafer coating
Matrial: Anodic Oxidation Aluminium Shell
7"LCD Panel with Enghlish Instruction Manual Book
Oiless vacuum pump with low noise
Servo motor, more stability
Specifications
Chamber Size
310mm
Maximum wafer sample
12inch (300mm)
Spin Speed
100~10000RPM
Acceleration adjustable range
0~50000-rpm/s
Each step max coating time
3000s
Chamber Vacuum degree
<-0.06MPa
Spin Control
Programmable control,100programmable with each 100steps can restore